ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

OEN:

ISO

Langue:

English

Code(s) de l'ICS:

23.160

Statut:

Publié

Date de Publication:

2023-12-05

Numéro Standard:

ISO 21360-6:2023