ISO 24477:2022

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges

This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.

OEN:

ISO

Langue:

English

Code(s) de l'ICS:

23.160

Statut:

Publié

Date de Publication:

2022-08-04

Numéro Standard:

ISO 24477:2022