ISO 24639:2022

Microbeam analysis — Analytical electron microscopy — Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV. This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
OEN:
ISO
Langue:
English
Code(s) de l'ICS:
71.040.50
Statut:
Publié
Date de Publication:
2022-07-04
Numéro Standard:
ISO 24639:2022