IEC 62047-34:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

OEN:

IEC

Langue:

English

Code(s) de l'ICS:

31.080.99; 31.140

Statut:

Publié

Date de Publication:

2019-04-04

Numéro Standard:

IEC 62047-34:2019