ISO 25178-604:2025

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

OEN:

ISO

Langue:

English

Code(s) de l'ICS:

17.040.20

Statut:

Publié

Date de Publication:

2025-02-13

Numéro Standard:

ISO 25178-604:2025