ISO/TS 22933:2022

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

OEN:

ISO

Langue:

English

Code(s) de l'ICS:

71.040.40

Statut:

Publié

Date de Publication:

2022-03-31

Numéro Standard:

ISO/TS 22933:2022