ISO 24688:2022
This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).
OEN:
ISO
Langue:
English
Code(s) de l'ICS:
25.220.01
Statut:
Publié
Date de Publication:
2022-07-21
Numéro Standard:
ISO 24688:2022