ISO 20146:2019

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

OEN:

ISO

Langue:

English

Code(s) de l'ICS:

23.160

Statut:

Publié

Date de Publication:

2019-01-30

Numéro Standard:

ISO 20146:2019