ISO 25178-607:2019
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
OEN:
ISO
Langue:
English
Code(s) de l'ICS:
17.040.20
Statut:
Publié
Date de Publication:
2019-03-04
Numéro Standard:
ISO 25178-607:2019