ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

OEN:

ISO

Langue:

English

Code(s) de l'ICS:

37.020

Statut:

Publié

Date de Publication:

2016-07-17

Numéro Standard:

ISO 16700:2016