ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration
Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
OEN:
ISO
Langue:
English
Code(s) de l'ICS:
23.160
Statut:
Publié
Date de Publication:
1979-08-31
Numéro Standard:
ISO 3530:1979