CAN/CGSB-115.19-95

1 SCOPE and LIMITATIONs 1.1 Scope This Recommended Practice covers testing methods for characterizing the performance of cleanrooms. It is intended to assist planners, designers, manufacturers, and buyers in preparing detailed specifications for cleanroom procurement and for assuring cleanroom operational compliance. Performance tests are recommended for three types of cleanrooms at three operational phases (see Table 1). The tests evaluate and characterize the overall performance of the cleanroom or clean zone system. The test methods recommend test equipment requirements and testing procedures for determining performance parameters. Where the test mehtod is affected by the type of cleanroom, alternative procedures are defined. For some of the tests, several different methods and instruments are allowed, so that different end-use considerations can be accommodated. Alternative methods are not necessarily equivalent. In contractual agreements, the buyer selects the specific tests appropriate to the cleanroom under consideration. Specific acceptance limits are also defined in contractual agreements. The test methods also may be used or adapted for periodic monitoring of cleanroom or clean zone performance capability. 1.2 Limitations This Recommended Practice does not recommend acceptance limits, but it does provide standard terminology for specifying appropriate limits.