IEC 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

OEN:

IEC

Langue:

English

Code(s) de l'ICS:

31.080.99

Statut:

Publié

Date de Publication:

2014-06-18

Numéro Standard:

IEC 62047-21:2014