IEC 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
OEN:
IEC
Langue:
English
Code(s) de l'ICS:
31.080.99
Statut:
Publié
Date de Publication:
2014-06-18
Numéro Standard:
IEC 62047-21:2014