IEC 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

OEN:

IEC

Langue:

English

Code(s) de l'ICS:

31.080.99

Statut:

Publié

Date de Publication:

2016-01-05

Numéro Standard:

IEC 62047-1:2016